For example, a MEMS for laboratory testing (lab-on-a-chip) can be designed with sensors to measure the flow rate of a liquid sample and at the same time identify any contaminates within the sample.

A team of researchers has developed a MEMS ... the sensor was exposed to known concentrations of hydrogen (H 2), carbon monoxide (CO), and ammonia (NH 3). Gases were introduced using mass flow ...

The “Regulation” section is one of those and enables the mp6 micropump to be controlled by a flow sensor. The Regulation package, in combination with the correct liquid flow sensor ...