MEMS resonators are made of thin layers of silicon or other materials that can be shaped into different structures, such as beams, plates, or disks. These structures can be attached to electrodes ...

The SiT5977 Super-TCXO from SiTime is a single-chip timing device that achieves 3X better synchronization than its ...

MEMS sensors and resonators have emerged as indispensable components across various applications, ranging from telecommunication to sensing systems and beyond. Their miniature size, low power ...

This chapter presents a method of integrating a specific class of integrated aluminum nitride (AlN) micro electro‐mechanical systems (MEMS) resonators and filters with complementary metal oxide ...

Vaire's upcoming MEMS-based resonator is expected to achieve 99.97% energy recovery. "In principle, this allows [us], over the next 10 to 15 years, to get to 4,000x improvement in performance ...

Abstract: This article proposes a temperature compensation scheme for MEMS resonant accelerometer (MRA) based on multimode decoupling. The frequency changes of the first-order and second-order modes ...

We delve into the dynamic world of microscale sensors and actuators, MEMS resonators, and energy harvesters, unraveling their intricate behaviors and propelling the field towards new heights. Our ...