This paper presents an RF microelectromechanical systems (MEMS) switch based on hybrid technology. Electromechanical, microwave, and fabrication design considerations are presented. The methodology is ...

Radio frequency microelectro-mechanical system (RF MEMS) switches have received attention due to their higher performances at high frequencies compared with semiconductor-based switches. However, most ...

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We present a nanomechanical device, operating as a reprogrammable logic gate, and performing fundamental logic functions such as AND/OR and NAND/NOR. The logic function can be programmed (e.g., from ...